
ILT-U-2053
ESD, Planar materials determinations
DETERMINATION | METHOD |
| Two-point resistance | ANSI/ESD STM 11.13 – 2015 |
| Surface resistivity | ANSI/ESD STM 11.11 – 2015 |
| Volume resistivity | ANSI/ESD STM 11.12 – 2015 |

ESD, Planar materials determinations
DETERMINATION | METHOD |
| Two-point resistance | ANSI/ESD STM 11.13 – 2015 |
| Surface resistivity | ANSI/ESD STM 11.11 – 2015 |
| Volume resistivity | ANSI/ESD STM 11.12 – 2015 |